Abstract
The design of a MEMS ultra-stable short duration current pulse generator has been presented. The device exploits single bubble sonoluminescence (SBSL) to convert acoustical energy to electrical energy through an intermediate optical stage. In the developed scheme, highly stable laser like short duration light pulses are emitted as high amplitude ultrasound waves strike a thermally generated microbubble stabilized in a small volume of water confined in a microfabricated cylindrical chamber. These light pulses are detected by an integrated photodetector to generate ultra-stable 100 picoseconds duration current pulses per acoustical cycle. The cylindrical geometry device is 650 mum in diameter and 300 mum in height and is designed to have a sensitivity of 5.56 mA/atm/cycle. The device could be used for tissue and nerve repair or micro-surgery.
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