A MEMS Singlet Oxygen Generator—Part II: Experimental Exploration of the Performance Space

Abstract

This paper reports the quantitative experimental exploration of the performance space of a microfabricated singlet oxygen generator (muSOG). SOGs are multiphase reactors that mix H2O2, KOH, and Cl2 to produce singlet delta oxygen, or O2 (a). A scaled-down SOG is being developed as the pump source for a microfabricated chemical oxygen-iodine laser system because scaling down a SOG yields improved performance compared to the macroscaled versions. The performance of the muSOG was characterized using O2 (a) yield, chlorine utilization, power in the flow, molar flow rate per unit of reactor volume, and steady-state operation as metrics. The performance of the muSOG is measured through a series of optical diagnostics and mass spectrometry. The test rig, which enables the monitoring of temperatures, pressures, and the molar flow rate of O2 (a), is described in detail. Infrared spectra and mass spectrometry confirm the steady-state operation of the device. Experimental results reveal O2 (a) concentrations in excess of 1017 cm-3, O2 (a) yield at the chip outlet approaching 80%, and molar flow rates of 02(a) per unit of reactor volume exceeding 600 times 10-4 mol/L/s.