Abstract
In this paper, a MEMS resonant vacuum gauge (MRVG) based on the squeezed film damping is proposed and its theoretical measurement model is established. The sensitive structure and electrodes of the MRVG were fabricated on SOI wafers and were wafer level packaged including intake hole. An resonance excitation and capacitive detection circuit consists of capacitive voltage converter (C/V) module, PLL and modulation and demodulation module was designed. Experimental tests were carried out in a standard vacuum calibration chamber, and the measurement results verified the theoretical model. The indication accuracy of the MRVG is less than ±20% in the vacuum range of 9×10−5 Pa ∼ 1 Pa. Moreover, the output voltage is still not saturated at the highest vacuum level (9×10−5 Pa), which lays the foundation for subsequent measurement of higher vacuum levels.
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