Abstract
A mid-IR thermal source, based on electrical heating of a platinum film, has been studied. The IR source, with effectively emitting area diameters of 1.6 mm, is obtained from heated platinum thin film resistors deposited on a Si/sub 3/N/sub 4//SiO/sub 2/ membrane. The IR source can emit wideband infrared light with a peak wavelength of /spl lambda/=2.62 /spl mu/m at 1106 K and be adapted to direct modulation with variable voltage. Appropriate heat transfer makes it possible to reach a modulation frequency as high as 50 Hz. Such specifications meet the requirements of the various IR gas sensors and can be regarded as a new thermal IR sources to be used in NDIR (non-dispersive infrared) gas analyzers.
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