A MEMS hardness sensor with reduced contact force dependence based on the reference plane concept aimed for medical applications

Abstract

In this study, the stable detection principle of a MEMS hardness sensor with “reference plane” structure is theoretically analyzed and demonstrated with experimental results. Hardness measurement independent of contact force instability is realized by the optimum design of the reference plane. The fabricated devices were evaluated, and a “shore A” hardness scale (JIS K 6301 A) was obtained as the reference in the range from A1 to A54 under a stable contact force. The contact force dependence on hardness sensor signals was effectively reduced by 96.6% using our reference plane design. Below 5 N contact force, the maximal signal error of hardness is suppressed to A8. This result corresponds to the detection capability for fat hardness, even when the contact force is unstable. Through experiments, stable detection of human body hardness has been demonstrated without any control of contact force.