Abstract

A MEMS Capacitive Accelerometer Design as Middle Ear Microphone Based on Ossicular Chain Micromechanic Characterization at Umbo for Fully Implantable Cochlear Prosthesis

Highlights

  • Over 30 million people in the United States and millions more around the world are affected by sensorineural hearing loss

  • The prototype accelerometer with the demonstrated sensing resolution, bandwidth, size, and weight can be packaged with a miniature customdesigned low-noise IC chip to function as a middle ear microphone for fully implantable cochlear prosthesis, which is being planned as the step

  • An accelerometer attached to an umbo is proposed as a middle ear microphone for future fully implantable cochlear prosthesis

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Summary

Introduction

Over 30 million people in the United States and millions more around the world are affected by sensorineural hearing loss. Progress has been made in developing and improving middle ear implantable systems that rely on piezoelectric effects[1] and electromagnetics[2,3] to compensate for hearing loss, these approaches do not address cochlear hair cell damage, which causes sensorineural hearing loss and is responsible for most hearing loss cases. Modern semi-implantable cochlear prosthetic systems address hair cell damage by the direct stimulation of the auditory nerve These implants continue to rely on external microphones, speech processors, and radio frequency coils. The removal of the incus shows an enhanced umbo vibration response when an external acoustic stimulus is applied.[13] Owing to the curved umbo surface, it is likely that during an implant procedure the sensor will exhibit position misalignment, deviating from the desired sensing axis to cause system performance degradation.

Human Temporal Vibration Characterization
Accelerometer Performance Measured on Umbo
MEMS Accelerometer Design and Fabrication
MEMS Accelerometer Measurement Results
Conclusion
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