Abstract
This paper present a two dimensional pneumatic actuator based on silicon MEMS technology for objects micro-manipulation using tilted air jets. The device is composed of three layers stacked together, two micro-machined silicon wafers and a Pyrex glass wafer. The system is composed of a set of micro-conveyors in about 9mm×9mm area. Each micro-conveyor has four nozzles and can generate tilted air-jets which allow four conveyance directions. An experiment of the conveyance of a silicon chip of 3mm diameter and weighing approximately 2mg was performed with pulsed air flow.
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