Abstract
An Fourier Transform Spectrometer (FTS) based on an H-shaped electrothermally actuated microelectromechanical system (MEMS) scanning mirror has been developed. The MEMS scanning mirror can generate about 200 μm at 5 Hz with only 5 Vpp and maintain a very small tilting of about 0.029° without using any complex compensation or closed-loop control. This high scanning performance is achieved by using a unique H-shaped frame supported by symmetrically distributed thirty-two pairs of innovative three-level-ladder bimorph actuators. This MEMS FTS can cover a wide spectral range of 1000–2500 nm. A spectral resolution of 64.1 cm−1, or 11 nm at 1310 nm, is achieved.
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