Abstract
Aiming at the development needs of low-frequency and high-sensitivity vector hydrophones, this paper has developed a micro-electro-mechanical system (MEMS) based co-oscillating electrochemical vector hydrophone. We obtained the optimized geometric parameters through simulation analysis of the diameter of the rubber membrane, the length of the flow channel and the diameter of the flow holes. Based on the simulation results, electrodes were fabricated using MEMS technology, and were then assembled and tested. Device characterization was conducted, where the sensitivity and bandwidth were quantified as 0.5–150 Hz, −187 dB ref. 1 V/μPa, respectively. Compared with a previously reported co-oscillating vector hydrophone, the co-oscillating vector hydrophone developed in this article featured a lower working frequency band.
Highlights
micro-electro-mechanical system (MEMS)-Based Co-OscillatingVector hydrophones are sensors that can detect underwater acoustic signals, and have a wide range of applications in military target monitoring, underwater reconnaissance, fish detection, and oil and gas exploration [1]
A gradient vector hydrophone consists of several sound pressure hydrophones, where the measurement of the vibration velocity at the center point is realized by measuring the sound pressure of each point and obtaining the sound pressure gradient of each axis [7]
The mainstream electrochemical vibration sensors are too large to be integrated into co-oscillating vector hydrophones, and the effective frequency bandwidth of the mainstream electrochemical vibration sensors cannot match the application requirements of vector hydrophones [18,19,20]
Summary
Vector hydrophones are sensors that can detect underwater acoustic signals, and have a wide range of applications in military target monitoring, underwater reconnaissance, fish detection, and oil and gas exploration [1]. According to the different working principles of the vibration sensors used, cooscillating vector hydrophones are mainly divided into piezoresistive vector hydrophones, piezoelectric vector hydrophones, and capacitive vector hydrophones [10]. The mainstream electrochemical vibration sensors are too large to be integrated into co-oscillating vector hydrophones, and the effective frequency bandwidth of the mainstream electrochemical vibration sensors cannot match the application requirements of vector hydrophones [18,19,20]. Vector hydrophones based on electrochemical vibration sensors have not been reported. The working bandwidth of the vibration sensor was optimized by adjusting electrode parameters to meet the low-frequency requirements of vector hydrophones. Through the optimization of assembly structures, the overall size of the vibration sensor was effectively reduced to enable its inclusion in the vector hydrophone
Sign-in/Register to view highlights & summary Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
