Abstract
Assembly of 3D micro/nanostructures in advanced functional materials has important implications across broad areas of technology. Existing approaches are compatible, however, only with narrow classes of materials and/or 3D geometries. This paper introduces ideas for a form of Kirigami that allows precise, mechanically driven assembly of 3D mesostructures of diverse materials from 2D micro/nanomembranes with strategically designed geometries and patterns of cuts. Theoretical and experimental studies demonstrate applicability of the methods across length scales from macro to nano, in materials ranging from monocrystalline silicon to plastic, with levels of topographical complexity that significantly exceed those that can be achieved using other approaches. A broad set of examples includes 3D silicon mesostructures and hybrid nanomembrane-nanoribbon systems, including heterogeneous combinations with polymers and metals, with critical dimensions that range from 100 nm to 30 mm. A 3D mechanically tunable optical transmission window provides an application example of this Kirigami process, enabled by theoretically guided design.
Highlights
Of 3D micro/nanostructures in advanced functional materials has important implications across broad areas of technology
Three-dimensional micro/nanostructures are of growing interest [1,2,3,4,5,6,7,8,9,10], motivated by their increasingly widespread applications in biomedical devices [11,12,13], energy storage systems [14,15,16,17,18,19], photonics and optoelectronics [20,21,22,23,24], microelectromechanical systems (MEMS) [25,26,27], metamaterials [21, 28,29,30,31,32], and electronics [33,34,35]
Of the many methods for fabricating such structures, few are compatible with the highest-performance classes of electronic materials, such as monocrystalline inorganic semiconductors, and only a subset of these can operate at high speeds, across length scales, from centimeters to nanometers
Summary
Of 3D micro/nanostructures in advanced functional materials has important implications across broad areas of technology. Precisely controlled compressive forces transform 2D micro/nanomembranes with lithographically defined geometries and patterns of cuts into 3D structures across length scales from macro to micro and nano, with levels of complexity and control that significantly exceed those that can be achieved with alternative methods. Theoretical and experimental studies in a broad set of examples demonstrate the applicability across length scales from macro to micro and nano, in materials ranging from monocrystalline silicon to metal and plastic, with levels of topographical complexity that significantly exceed those possible with other schemes. The resulting engineering options in functional 3D mesostructures have important implications for construction of advanced micro/nanosystems technologies
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