Abstract
A fast deconvolution algorithm has been developed in which low resolution XPS data can be enhanced by removing the detector and source functions. Initially, a maximum entropy method is applied using a fast matrix algorithm. Secondly, the probability function has been modified to incorporate the prior knowledge of the signal to noise ratio and a significant resolution enhancement is achieved. Finally, a further improvement to the processing time is discussed. The algorithms work by modelling the convolution process using simple matrix algebra. The deconvolution can be carried out in about a minute on a modern PC. These algorithms have been applied to the poorly resolved C1s region of a metal phthalocyanine film, and the resulting enhancement allows previously unresolved structure to be observed without the need to fit assumed peak shapes to the measured spectrum.
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