A matrix approach to grazing-incidence X-ray diffraction in multilayers

Abstract

A method for computation of X-ray grazing-incidence diffraction (GID) in multilayers and superlattices is presented. The method is based on X-ray dynamical diffraction theory and a matrix from a boundary equations and provides a simple numerical solution of the problem. The application of the method to simulating GID measurements taken from A1As/GaAs superlattice (20 periods of 14.6 nm A1As and 6.8 nm GaAs) demonstrates the principal validity of the theory. A perfect matching between the theory and the experiment requires the real-structure effects of sample to be taken into account.