Abstract
The reliability of the measurement of trace moisture in a gas was improved markedly owing to the establishment of a trace moisture standard at AIST. As a result, problems with conventional methods for measuring trace moisture in gases were revealed. This article presents the scenario which we adopted to improve the reliability of measurement of the trace moisture, the development of a national trace moisture standard, the provision of a metrological system traceable to a national standard for industrial measurements, and problems revealed of trace moisture analyzers available commercially through comparisons with the national standard. This improvement makes it possible to evaluate properly the quality of high purity gases used in industry.
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