Abstract
TMR (tunneling magnetoresistance) has the characteristics of high sensitivity, large linear range, low power consumption, and easy miniaturization, and has received great attention in the field of miniaturized and high-performance magnetic sensors. Widely used in marine magnetic field detection, earthquake monitoring, industrial control, and other fields. In this paper, A TMR marine magnetometer with AC modulation and magnetic field feedback compensation is proposed, designed, and manufactured, which can be used for the measurement of weak marine magnetic fields. After testing, its measurement range is ±100,000nT, the noise fluctuation level is 0.27nT, and nonlinearity level reaches 0.07%. It works by means of ac modulation and real-time compensation of feedback magnetic field, which greatly reduces magnetic hysteresis and increases the linearity. Compared with the nonlinearity of TMR material (more than 20% within ±1Oe, more than 7% within ±0.3Oe), it has been significantly improved.
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