Abstract
Deformable mirror is a crucial component of adaptive optics. It can be used to vary the optical power of an optical image system, such as auto-focus and optical zoom function. An electrostatic type MEMS deformable mirror used in an optical image system has been promoted recently. However, high voltage in the range of hundreds volts is a serious concern for electrostatic type MEMS deformable mirror. Ionic-polymer metal composite (IPMC) is a polymer actuator with the advantage of large deformation under low actuation voltage. It is a sandwich structure composed of two metal electrodes and a layer of polymer film. The hydrated cation inside the polymer film moves toward the cathode. Because of the migration of ions and water inside the film, volume expansion and contraction induce the deformation of IPMC. In this paper, we design the IPMC type deformable mirror that is simulated by finite element method and then demonstrate its focus-varying function. It requires less than one volt to achieve over 100 diopters.
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