Abstract
The evolution of hydrogenated amorphous carbon films with fullerene‐like microstructure was investigated with a different proportion of hydrogen supply in deposition. The results showed at hydrogen flow rate of 50 sccm, the deposited films showed a lower compressive stress (lower 48.6%), higher elastic recovery (higher 19.6%, near elastic recovery rate 90%), and higher hardness (higher 7.4%) compared with the films deposited without hydrogen introduction. Structural analysis showed that the films with relatively high sp2 content and low bonded hydrogen content possessed high hardness, elastic recovery rate, and low compressive stress. It was attributed to the curved graphite microstructure, which can form three‐dimensional covalently bonded network.
Highlights
Hydrogenated amorphous carbon films with fullerene-like microstructure have attracted increasing attention due to their extraordinary properties of high mechanical hardness and low friction coefficient [1,2,3,4]
Until now, hydrogenated amorphous carbon films with fullerene-like microstructure had been synthesized by our group and other groups with different techniques including dc pulse plasma chemical vapor deposition (CVD), magnetron sputtering (MS), ECR CVD, and ICP CVD [1,2,3,4,5,6,7,8]
The as-deposited carbon films could be considered as nanocomposite thin films with fullerene-like microstructure in the diamond-like carbon (DLC) matrix based on our previous results [1, 2]
Summary
Hydrogenated amorphous carbon films with fullerene-like microstructure have attracted increasing attention due to their extraordinary properties of high mechanical hardness and low friction coefficient [1,2,3,4]. It can be as a protective coating in tooling components, such as knives, drill bits, dies, and molds, and as a coating on hard-disk platters and harddisk read heads. The film deposited at hydrogen flow rate 20 and 50 sccm showed higher hardness and elastic and lower compressive stress
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