Abstract
LiNbO 3 slices were chemically reduced in radio-frequency hydrogen plasma for 20–80 minutes. The H 2 pressure was about 0.5 Torr at a flow rate of 8 sccm. The samples turned black after plasma treatment. The degree of bulk reduction was investigated via electric resistance measurements. A resistance gradient reflecting the reduction degree under the sample surface exists. A low-resistance surface layer appeared on the sample after treatment in RF plasma at low H 2 pressure (< 1 Torr). The layer resistivity decreases with the electric current increase. Resistivity of 2.6 mΩ cm was measured.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
