Abstract
We describe the design of a novel low-profile valve to isolate a molecular beam source from an ultrahigh vacuum system. The valve thickness is simply the thickness of a standard double-sided Conflat flange, on which the valve gate and actuation mechanism are assembled in a fully recessed configuration. The valve gate can accommodate a skimmer and/or several source collimating apertures. The manual actuator is mounted radial to the Conflat flange.
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