A Low Frequency Permanent Magnet Passive Vibration Isolator

Abstract

Magnetic suspension vibration isolators have attracted significant attention in the field of semiconductor industry and high precision equipments. However, it is impossible to levitate an object by only permanent magnet due to instability of permanent magnets. It needs a guide device or active control to hold the magnetic suspension passive vibration isolator (MSPVI) at equilibrium position. In order to overcome the instability of the permanent magnets, the linear bearing, rubber O-ring and rubber membrane are applied in the MSPVI. The transmissibility of the MSPVI was calculated and subsequently measured. The experimental results show that the MSPVI can achieve low natural frequency with the help of the rubber membrane which is superior to the linear bearing and o-ring. Beside, the vibration isolating performance of the MSPVI is measured. The experimental results reveal that the MSPVI achieves the lowest resonant frequency when the load capacity of the MSPVI reaches maximum value.