Abstract
A micromechanical resonant vibration sensor (MRVS) is presented with a geometrical structure that is designed for the detection of vibrations in the low-frequency range. The MRVS is distinguished from conventional piezoelectric and micromechanical acceleration sensors by the utilization of the resonance effect. The signal-to-noise ratio increases significantly when the sensor is excited with the designed frequencies. The vibrational properties of the MRVS have been investigated in the laboratory. Examples of the sensor response to different vibrational sources are analysed under industrial conditions. The capability of the sensor principle for wear monitoring is discussed.
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