Abstract
We report on the design of an ion source for the production of single and double charged Helium ions with kinetic energies in the range from 300 eV down to 5 eV. The construction is based on a commercial sputter ion gun equipped with a Wien-filter for mass/charge separation. Retardation of the ions from the ionizer potential (2 keV) takes place completely within the lens system of the sputter gun, without modification of original parts. For 15 eV He(+) ions, the design allows for beam currents up to 30 nA, limited by the space charge repulsion in the beam. For He(2 +) operation, we obtain a beam current of 320 pA at 30 eV, and 46 pA at 5 eV beam energy, respectively. In addition, operating parameters can be optimized for a significant contribution of metastable He*(+) (2s) ions.
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