A Low-Cost Flexible Capacitive Pressure Sensor for Health Detection

Abstract

In this work, we develop a flexible capacitive pressure sensor with simple structure, low cost, wide operating range, excel repeatability and high sensitivity. The sensor greatly reduces cost while maintaining performance by using a simple method of preparing the dielectric layer and inexpensive chemical materials. The sensor has a excel dynamic response (80ms) and recovery (55ms) and combines high sensitivity (0.3199kPa^−1, < 10kPa) with a wide operating range (0.1-65 kPa). It is capable of stable operation for 1400 cycles. In addition, the capacitive pressure sensor has a large signal variation (4.1033nF/kPa), and the capacitance variation can be recognized and processed by a simple measurement circuit. Later experiments and the development of a wireless communication device have also demonstrated the great potential of this flexible capacitive pressure sensor for human detection and biomedical applications. Overall, this sensor is a promising low-cost wearable pressure sensor.