A literature review, classification and simple meta-analysis on scheduling of batch processors in semiconductor

Abstract

In this paper, we present a literature review, classification schemes and a simple meta-analysis for scheduling of batch processors (SBP) research in semiconductor manufacturing (SM). This review is based on a study of journals and web-based documents/articles, which include conference materials, lecture notes in computer science, working papers, etc. There are 98 articles published in various publication outlets between 1986 and October 2004. Based on the literature review carried out and the nature of SBP research observed in SM, we have introduced two classification schemes to systematically organize the published articles. The first classification scheme is based on the problem configurations of SBP research in SM and the second one is based on the solution methodology followed by the researchers. These classification schemes indicate that there is much research scope on SBP research in SM. Furthermore, a simple meta-analysis is carried out to enhance understanding on the development and evolution of SBP research in SM and to identify potential research areas for further research and for improvement. The results show that there is an increasing trend in SBP research in SM. A comprehensive list of references is presented. This study is expected to provide a source of reference for other researchers (or readers), who are interested in SBP research particularly in SM and help stimulate further interest.