Abstract
In this paper a new concept of a liquid-surface-based three-axis inclination sensor for evaluation of angular error motion of a precision linear slide, which is often used in the field of precision engineering such as ultra-precision machine tools, coordinate measuring machines (CMMs) and so on, is proposed. In the liquid-surface-based three-axis inclination sensor, a reference float mounting a line scale grating having periodic line grating structures is made to float over a liquid surface, while its three-axis angular motion is measured by using an optical sensor head based on the three-axis laser autocollimation capable of measuring three-axis angular motion of the scale grating. As the first step of research, in this paper, theoretical analysis on the angular motion of the reference float about each axis has been carried out based on simplified kinematic models to evaluate the possibility of realizing the proposed concept of a three-axis inclination sensor. In addition, based on the theoretical analyses results, a prototype three-axis inclination sensor has been designed and developed. Through some basic experiments with the prototype, the possibility of simultaneous three-axis inclination measurement by the proposed concept has been verified.
Highlights
A precision linear slide is one of the most important components in precision machine tools and precision measuring instruments [1]
It should be noted that, in this paper, attention has been paid to verifying the possibility of the proposed three-axis inclination sensor, and only basic experiments been carried to
In the three-axis inclination of sensor, the frictional force between supporting andon theareference float, and application to the the reference float, the which is madeneedle to float water surface, hasthe been employed as a evaluation of angular error motions of precision linear slides after the improvement of measurement reference for the detection of three-axis tilt angles, while the optical sensor head based on the resolution enhancement of techniques as low-pass filtering, will with be three-axiswith laserthe autocollimation hassignal been processing employed to detect its such relative angular displacement carried out future work.float
Summary
A precision linear slide is one of the most important components in precision machine tools and precision measuring instruments [1]. By employing two-degree-of-freedom position detectors such as CCDs [6] or multi-cell photodiodes [7], simultaneous two-degree-of-freedom measurement of tilt angles of a linear slide can be carried out in a simple manner just by placing a target reflector on a slide table and adjusting the optical axis of an autocollimator with respect to the target. When a two-axis autocollimator is placed in such a way that its optical axis coincides with a primary motion axis of a linear slide, both pitch and yaw angles of the linear slide can be measured simultaneously. A roll angle, which could significantly affect the positioning accuracy of a linear slide when the measurement axis of a displacement sensor is placed with an offset from the motion axis of the linear slide [2], cannot be measured. This induces another problem; Sensors 2018, 18, 398; doi:10.3390/s18020398 www.mdpi.com/journal/sensors
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