A Linear Ultrasonic Motor Based on Coupling Vibration Mode

Abstract

A coupled linear ultrasonic motor (LUSM) based on an eccentric constraint was proposed. Two pieces of oblique piezoelectric ceramics were arranged at each end of the elastomer, and the polarization direction of the ceramics was vertically upward. Using the tilting characteristics of the piezoelectric ceramics, the two ends of the fixed piezoelectric ceramics formed an eccentric restraint on the motor, providing conditions for the motor to generate coupled modes. When the elastomer of the motor generated the coupling vibration, the motion trajectories of the driving feet ends were oblique straight lines, and the oblique straight-line motion trajectories of the upper and lower driving feet ends were in opposite directions, driving the upper and lower sliders to run simultaneously. The stator parameters were optimized by using ANSYS to obtain larger amplitudes for the ends of the driving feet in both X and Z directions. The structure and operation principle of the motor are explained in detail. A prototype was fabricated to study the arrangement scheme with fixed constraints at the ends of the motor. The frequency-velocity characteristics, voltage-velocity characteristics, and mechanical characteristics of the motor were tested. The no-load speed and maximum output power were measured to be 45.9 mm/s and 3.24 mW.