Abstract
In the field of piezoelectric actuators, high speed piezoelectric stick-slip actuators have received considerable attention. A linear stick-slip piezoelectric actuator is proposed in this article, which combines asymmetric flexure hinge with triangular displacement amplification mechanism. The designed linear piezoelectric stick-slip actuator can achieve high speed at lower frequency. The configuration of the actuator and driving principle are illustrated and designed by theory and simulation. In order to study its performance, a prototype is fabricated, and an experimental system is established. The experimental results confirm that the maximum step efficiency of the prototype is 97.9 %. The maximum speed is 20.17 mm/s under the driving voltage of 100 V P-P , the driving frequency of 610 Hz and the locking force of 2.5 N. The maximum load capacity is 2.4 N under the locking force of 3.5 N. The proposed piezoelectric stick-slip actuator increases the step efficiency and improves the output speed at lower frequency.
Highlights
Piezoelectric actuators play an important role in manufacturing [1], which are widely used in semiconductor manufacturing, biomedical manipulations [2], [3], microscope scanning [4], [5] and material micromechanical testing [6] due to their simple structure, fast response, large stroke and no electromagnetic interference [7]–[9]
The actuator proposed by the article is based on asymmetric flexure hinge mechanism with triangular displacement amplification mechanism, which has the characteristics of large lateral displacement
Simulation verification, theoretical analysis, and experimental results show that the linear actuator has high speed and output efficiency, which expands its application in machining and manufacturing
Summary
Piezoelectric actuators play an important role in manufacturing [1], which are widely used in semiconductor manufacturing, biomedical manipulations [2], [3], microscope scanning [4], [5] and material micromechanical testing [6] due to their simple structure, fast response, large stroke and no electromagnetic interference [7]–[9]. In order to improve the output speed of the piezoelectric actuator, it is often used to increase the displacement of one step, the driving voltage, the driving frequency and reduce the backward motion. By increasing the driving voltage and frequency, Wang et al developed a piezoelectric actuator using the parasitic motion idea combined with displacement amplification mechanism [30]. Li et al developed a bidirectional piezoelectric stick-slip actuator based on the principle of flexible hinge lever amplification [35], increasing the displacement of one step and the speed of the slider. The actuator proposed by the article is based on asymmetric flexure hinge mechanism with triangular displacement amplification mechanism, which has the characteristics of large lateral displacement It greatly improves the output speed of the piezoelectric actuator at lower frequency. Simulation verification, theoretical analysis, and experimental results show that the linear actuator has high speed and output efficiency, which expands its application in machining and manufacturing
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