A linear ion optics model for extraction from a plasma ion source

Abstract

A linear ion optics model for ion extraction from a plasma ion source is presented, based on the paraxial equations which account for lens effects, space charge and finite source ion temperature. This model is applied to three- and four-electrode extraction systems with circular apertures. The results are compared with experimental data and numerical calculations in the literature. It is shown that the improved calculations of space charge effects and lens effects allow better agreement to be obtained than in earlier linear optics models. A principal result is that the model presented here describes the dependence of the optimum perveance on the aspect ratio in a manner similar to the nonlinear optics theory.