Abstract
The new technologies of precise positioning systems with high speed and accuracy have been in the focus of attention in the recent years. In this research, a one-axis walker type inchworm piezomotor has been designed, modeled, manufactured and characterized. Simple design, simple manufacturing and assembly processes, low manufacturing cost and also high speed and stroke are advantages of this piezomotor. This system consists of three piezoelectric actuators, which installed into the clamps and feeder sets, and a guideway. The geometrical parameters with a high impact on the stiffness have been realized and modeled by the finite element method to ensure the proper functioning of the piezomotor. The motor dimensions are 55 × 23.1 × 15 mm3 which can provide a large movement range inside the guideway. The simulation analysis and experimental tests have been carried out to characterize the piezomotor. Based on the shape mode analysis, the maximum operating frequency of the piezomtor has been determined. Also, the Von-Mises stress analysis has been employed to predict the structural behavior of the motor. Finally, the experimental tests have been conducted to illustrate the piezomotor characteristics such as step pitch, speed, and operating frequency.
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