A Lateral-Shift-Free and Large-Vertical-Displacement Electrothermal Actuator for Scanning Micromirror/Lens

Abstract

This paper reports the design, fabrication and characterization of a novel lateral-shift-free (LSF) large-vertical-displacement (LVD) electrothermal actuator. Both micromirror and microlens holder based on the actuator design have been fabricated by a combined surface- and bulk- micromachining process. A 0.62mm vertical displacement has been demonstrated at only 5.3Vdc for a fabricated 0.8mm by 0.8mm micromirror, and both the lateral shift (10μm) and tilting angle (0.7°) are negligible in the full displacement range. The measured resonant frequency of the vertical motion resonance mode is 453Hz.