Abstract

A laser-based system that is capable of measuring the angular deflection of the microplate in two-dimension is developed. The system consists of a HeNe laser, lenses, beamsplitters, objective lens, CCD camera and position sensitive photodiode. The operation of the system is based on the measurement of the displacement of a HeNe laser beam reflecting off the surface of the microplate using position sensitive photodiode. The angular resolution is estimated at 0.2° and the response time of the system is as short as 4 μs. This system can measure the static and dynamic angular response and resonance frequency of microplates, such as spatial light modulators and micromirrors, in two orthogonal directions.

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