Abstract
This paper evaluates the microwave nonlinear properties and tuning at RF frequencies of ferroelectric Ba0.3Sr0.7 TiO3 thin films by on-wafer measurements of the second- and third-order harmonics and intermodulation products of several coplanar transmission lines as a function of dc bias. We analyze these data by use of a large-signal circuit model to obtain the nonlinear distributed capacitance as a function of voltage. Whereas the model with an electric-field-dependent dielectric constant for the ferroelectric material is able to predict the tuning when a dc voltage is applied and the generated harmonics, it disagrees with the measured third-order intermodulation products at frequencies 2ω1-ω2 and 2ω2-ω1. Nonlinear effects due to self heating mechanisms are also considered, along with an additional phenomenological source of nonlinearities, to model all the observables. Interactions between the ferroelectric and self-heating components give rise to a deep null in both the measured and modeled intermodulation-distortion component.
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