Abstract
Three-dimensional (3D) imaging sensors allow machines to perceive, map and interact with the surrounding world1. The size of light detection and ranging (LiDAR) devices is often limited by mechanical scanners. Focal plane array-based 3D sensors are promising candidates for solid-state LiDARs because they allow electronic scanning without mechanical moving parts. However, their resolutions have been limited to 512 pixels or smaller2. In this paper, we report on a 16,384-pixel LiDAR with a wide field of view (FoV, 70° × 70°), a fine addressing resolution (0.6° × 0.6°), a narrow beam divergence (0.050° × 0.049°) and a random-access beam addressing with sub-MHz operation speed. The 128 × 128-element focal plane switch array (FPSA) of grating antennas and microelectromechanical systems (MEMS)-actuated optical switches are monolithically integrated on a 10 × 11-mm2 silicon photonic chip, where a 128 × 96 subarray is wire bonded and tested in experiments. 3D imaging with a distance resolution of 1.7 cm is achieved with frequency-modulated continuous-wave (FMCW) ranging in monostatic configuration. The FPSA can be mass-produced in complementary metal–oxide–semiconductor (CMOS) foundries, which will allow ubiquitous 3D sensors for use in autonomous cars, drones, robots and smartphones.
Highlights
Conclusions and discussionsWe have presented the performance of a large-scale (16,384-pixel) imaging light detection and ranging (LiDAR) using a 128 × 128 silicon photonic focal plane switch array (FPSA), in which a 128 × 96 subarray is wire bonded and tested in experiments
Autonomous systems powered by artificial intelligence will have a transformative impact on our society. 3D sensors that directly measure the coordinates, shapes and velocities of objects have seen an increasing number of applications in autonomous vehicles, drones and robots[3,4]
We experimentally demonstrate a 16,384-pixel frequency-modulated continuous-wave (FMCW) imaging light detection and ranging (LiDAR) with a monolithically integrated 128 × 128-element silicon photonic microelectromechanical systems (MEMS) focal plane switch array (FPSA) (a 128 × 96 subarray is wire bonded and tested in experiments)
Summary
We have presented the performance of a large-scale (16,384-pixel) imaging LiDAR using a 128 × 128 silicon photonic FPSA, in which a 128 × 96 subarray is wire bonded and tested in experiments. K. et al Two-dimensional free-space beam steering with an optical phased array on silicon-on-insulator. A monolithically integrated large-scale optical phased array in silicon-on-insulator CMOS. Y. et al Sub-wavelength-pitch silicon-photonic optical phased array for large field-of-regard coherent optical beam steering. T. et al A single-chip optical phased array in a wafer-scale silicon photonics/CMOS 3D-integration platform. A. et al Large-scale optical phased array using a low-power multi-pass silicon photonic platform. V. et al 8192-element optical phased array with 100° steering range and flip-chip CMOS. Y. et al 2D broadband beamsteering with large-scale MEMS optical phased array. J. et al Planar-lens enabled beam steering for chip-scale LIDAR. Demonstration of a new optical scanner using silicon photonics integrated circuit. Lens-based integrated 2D beam-steering device with defocusing approach and broadband pulse operation for Lidar application. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/
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