Abstract
Based on the micro electronic mechanical system (MEMS) processing, a large size 2-D scanning mirror driven by electromagnetic force was designed and implemented in this paper. Here we fabricated micromirror with the silicon wafer and electroplated soft Ni film on the backside of mirror. The no-coil structural micro-mirror prevented heat produced on the mirror effectively. The scanning resonant frequency for the mirror is 674Hz along slow axis, and 1870Hz along fast axis. Finally, the MEMS mirror was used in laser display system to reduce the laser speckle. With the 2-D scanning of the MEMS mirror, the speckle contrast could be reduced to 4.2%. We demonstrated that the image quality of a laser display system could be greatly improved with the MEMS mirror.
Highlights
Solid-state lasers can provide wider color gamut, longer lifetime, and higher brightness and contrast of images compared to light emitting diodes (LEDs), a popular light source for projection displays [1]
Research on microelectronic mechanical system (MEMS) scanning mirrors are mostly focused on small diameter MEMS mirrors, while rarely on the larger size
Microvision Company in the United States developed an electromagnetic two-dimensional scanning mirror, and successfully applied it to a laser Pico projection system, but the 1-mm diameter of the mirror was unable to meet the requirements of the high lumen imaging display [8]
Summary
Solid-state lasers can provide wider color gamut, longer lifetime, and higher brightness and contrast of images compared to light emitting diodes (LEDs), a popular light source for projection displays [1]. One of the promising speckle reduction technologies in laser projection [5,6] is to employ MEMS scanning mirrors. Microvision Company in the United States developed an electromagnetic two-dimensional scanning mirror, and successfully applied it to a laser Pico projection system, but the 1-mm diameter of the mirror was unable to meet the requirements of the high lumen imaging display [8]. FFiigguurree 44 sshhoowwss tthhee ppaacckkaaggee mmeetthhoodd aanndd ffuulllyy aasssseemmbblleedd pprroottoottyyppee. No significant fracture or electrical failures were observed until the prototype was tested at 900 g for X direction and 1500 g for Y, Z directions, where g is the gravity acceleration (g ≈ 9.8 m/s2), demonstrating that the micro-mirror and applied package structure have good shock resistance. These results show that the device is reliable and durable for practical applications
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