Abstract
Linear optical encoders with a nano-resolution have been widely applied in various precision engineering fields for displacement feedback supporting micro/nano motions regulated by feedback control systems. However such sensing method is sensitive to assembly tolerance in the lateral motion (perpendicular to the primary direction), which limits its applications to single-axis motion systems or very small stroke multi-axis motion systems. In this paper, a large range X-Y parallel flexure-beam based micro-motion system is developed with an enhanced sensing framework employing two linear optical encoders to measure the two-axis large outputs. Meanwhile, both the open-loop and preliminary closed-loop experiments are conducted, demonstrating effectiveness of the proposed design and accurate sensing capability of the sensing framework.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
