Abstract
Large-pressure-range, large-sensing-distance evanescent-mode resonator wireless passive pressure sensors were fabricated from silicon carbonitride polymer-derived ceramic (PDC-SiCN) films enhanced by the polymer-infiltration-pyrolysis (PIP) process. The properties of PIP enhanced PDC films ensure a large pressure range for the sensor. To increase the sensing distance between the interrogation antenna and the sensor, the size or position of the resonator and slot antenna were optimized by High Frequency Structure Simulator simulations. The experimental results show that the resonant microwave signal can be wirelessly detected at distances up to 30 mm. The pressure sensor has a large pressure range (0–850 kPa) and high pressure sensitivity (211.8 kHz kPa−1) in pressure environments at room temperature.
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