Abstract
Low-pressure plasma created in gases of two- or multiatom molecules is often used for dissociation of molecules to parent atoms. The dissociation fraction depends on the type of discharge, the discharge power and coupling, the properties of the discharge reactor, and the pumping speed. Large quantities of atoms are produced in large reactors providing poor loss due to heterogeneous surface recombination. The best results are obtained in electrodeless radio-frequency discharges created in glass discharge systems. An example of such a system is presented in this paper.
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