Abstract
The present work deals with a theoretical analysis of operating principle of cylindrical ultrasonic micromotors. Although the movement has been realised by experiments and measurements, a fairly deep-going mathematical description on the motion has not been seen in literature. The work carried out in this paper is based on simplified beam bending vibration model. The obtained expressions provide a theoretical understanding of the motor operation and driving mechanism. The analysis is also valuable for further modelling and simulation of the motors.
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