Abstract
The anodic aluminum oxide (AAO) template with ordered pores was firstly fabricated in oxalic acid solutions using two-step anodization method. Then, a layer of polymethylmethacrylate (PMMA) was uniformly laid on one surface of the AAO template by a Spin-Coater, then baked and cooled them, after that, the H3PO4 solution was utilized to dissolve the residual aluminum and barrier layer, as the result, the functional nanopillar arrays were achieved. Finally, the morphology of the functional PMMA nanopillars was examined with the Scanning Electron Microscope (SEM) and the properties were discussed. The functional nanopillar arrays could be applied to the micro and nano-scale devices as the sensors for the biological, chemical and single molecular detection.
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