Abstract
W e develop a finite element?finite difference method for solving three-dimensional heat transport equations in a double-layered thin film with microscale thickness. The implicit scheme is solved by using a preconditioned Richardson iteration, so that only two block tridiagonal linear systems with unknowns at the interface are solved for each iteration. W e then apply a parallel Gaussian elimination procedure to solve these two block tridiagonal linear systems and develop a domain decomposition algorithm for thermal analysis of the double-layered thin film. Numerical results for thermal analysis of a gold layer on a chromium padding layer are obtained.
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