Abstract
We have developed a wavelength tunable fiber optic filter by using a hybrid-assembly technique of glass reflector cubes (volume 1mm3) onto a bulk-micromachined electrostatic translation stage (4mm×5mm). More than 0.6-μm-change of the Fabry-Pérot interferometer gap could be electrostatically controlled with a tuning voltage upwards of 4V with the aid of a DC bias voltage of 64V. A wide tuning range from 1479 to 1590nm was achieved with a bandwidth of 1.3–1.2nm and insertion loss of 1.59–1.76dB.
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