Abstract
For the past few years, integrated machines (i.e. cluster tools) in wafer fabrication have been widely used to achieve reductions in cycle time, contamination, operator handling, capital costs and required floor space. The integration among several processing steps can lead to savings in cycle time, labour costs and inventory, and often provides a dramatic opportunity for yield improvement by preventing contamination. However, because of its complex configurations, modelling and analysis on the activities of an integrated machine is not an easy task. In this paper, a hybrid approach is introduced in order to model and to analyse the activities of the integrated machine.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
