Abstract
A miniature piezoelectric ultrasonic linear motor (piezoelectric vibrator sizes: 4.7 × 13.5 × 2 mm3) has been studied for precise actuation at 200 °C high-temperature. This piezoelectric linear motor was made of (1-x)BiScO3-xPbTiO3 piezoelectric ceramic with a high curie temperature (428 °C) and it was operated in first longitudinal and the second bending double-mode. Our experimental results showed that the linear motor moves smoothly at the temperature as high as 200 °C with a driving force of 0.35 N and a speed up to 42 mm/s.
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