Abstract
High-speed atomic force microscope has been a promising tool for dynamic process investigation in the fields such as crystallization, phase change, biological and biophysical events, nanolithography as well as industrial serial production. In the paper, the principle of atomic and friction force microscopic imaging is first described. A high-speed atomic and friction force microscopic imaging system based on a novel optical beam deflection design is then presented in details. Topographic and friction force images of a fluorine-doped tin oxide-coated conductive glass surface taken with the system are given, showing that the system has the high speed imaging capability with a nanometer resolution.
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