Abstract
Flexible pressure sensor matrix, which can perceive the external mechanical stimuli with high spatial resolution, is the essential component for the electronic skin (E-skin) and is also able to be applied in various areas such as health monitoring and disease diagnosis. However, the design and fabrication of high-resolution pressure sensors with a high linearity in medium pressure range (10 kPa-100 kPa) at no power consumption is seldom reported. Here, we fabricate a self-powered pressure sensor matrix based on wurtzite structured ZnO nanowires (NWs) grown by hydrothermal method. The geometry and density of ZnO NWs were analyzed using a finite element method (FEM) to optimize the sensing performance. The matrix with an area of 25 mm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> consists of 25 sensors with the dimension of each unit being 500 μm * 500 μm (density of 100/cm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> ). Each sensor can be accessed independently and shows a linear response for the pressure ranging from 15 kPa to 50 kPa. The proposed self-powered pressure sensor matrix in this study shows a great potential in the application of wearable devices.
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