A High-Precision Absolute Angular Position Sensor With Vernier Capacitive Arrays Based on Time Grating

Abstract

This paper presents a high-precision absolute capacitive angular position sensor based on time grating. The sensor includes two single ring incremental type sensors arranged as outer and inner rings of capacitive arrays forming $N$ and $N-1$ measurement periods, respectively. The outer ring incremental sensor is employed as a fine measurement component to provide high-precision angular displacement values. The phase difference between the two incremental sensors is employed as a coarse measurement component to achieve absolute angular positioning according to a measurement principle similar to that of a vernier caliper. The proposed design is validated and optimized via tests conducted for a prototype sensor with $N\,\,=180$ and a diameter of 154 mm fabricated using standard printed circuit board manufacturing technology. Based on these results, a differential induction electrode structure is proposed to greatly reduce the magnitude of crosstalk interference signals captured by the induction electrodes of one array produced by the lead wires of the excitation electrodes of the other array. The optimized sensor achieves absolute angular position measurements with an original measurement accuracy of ±2” over a full 360° measurement range. The proposed sensor has advantages of low cost, high measurement precision, simple positioning method, and ease of manufacture.