Abstract
A chemoresistive sensor for ethanol with Pt-microdots doped zinc oxide (ZnO) thin film as sensing layer has been studied with a coplanar microheater architecture with inter-digitated electrodes (IDE's). ZnO thin films are fabricated using the sol-gel method. The doping with platinum is performed by RF Sputtering method. The present study suggests the use of a coplanar microheater with IDE's fabricated for the ethanol sensor. Further, the effect of doping on sensing properties of the sensor has been studied. The sensing response of the sensor with the film thickness of 430 nm at an operating temperature of 180°C comes out to be 110. The prime aim of the study is to present a highly sensitive ethanol sensor having a coplanar architecture of microheater with IDE's in a ZnO based sensor.
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