A highly sensitive flexible humidity sensor based on a wafer-level composite material of carbon-quantum-dots@nanofiber clusters

Abstract

A novel composite material composed of carbon-quantum-dots@nanofiber clusters (CQDs@NFCs) is successfully developed in wafer level, taking it as a sensitive material, a flexible humidity sensor is also developed. Since the composite material is superhydrophilic and contains a super large number of nanopores of different sizes, capillary condensation is able to take place within the composite material at different relative humidity (RH) conditions. Taking advantage of the chemi-physisorption and the capillary condensation, such a sensing material helps to significantly improve sensitivity of the flexible sensor, especially at low RH conditions. Compared with the device adopting only nanofibers as the sensing material, this novel sensor offers a 4.3-time increament in sensitivity within a humidity range of 7%−59% RH, while maintains high sensitivity in the entire humidity range. This heightened sensitivity is crucial for monitoring low-level humidity with high accuracy, making the sensor highly promising for various applications.