A high-speed low-voltage stress-induced micromachined 2 x 2 optical switch

Abstract

A low-voltage electrostatically actuated 2/spl times/2 fiber optic switch is achieved using a stress-induced curved polysilicon actuator. The curved polysilicon beam substantially lowers the electrostatic operating voltage of the switch. Large mirror displacement (300 /spl mu/m) and low operating voltage (20 V) are obtained simultaneously. Sub-millisecond switching time (<600 /spl mu/s), low optical insertion loss (0.7 dB), and small polarization-dependent loss (0.09 dB) have been achieved.