A High-Speed Inkjet-Printed Microelectromechanical Relay With a Mechanically Enhanced Double-Clamped Channel-Beam

Abstract

We report a high-speed inkjet-printed three-terminal microelectromechanical (MEM) relay with a double-clamped beam that exploits the enhanced stiffness of the double-clamped structure to improve electrical performance. To minimize mechanical delay and pull-in voltage, the contact gap between the channel-beam and drain, and the stiffness of the beam and shape of the drain was carefully designed and optimized through a 3-D finite element simulation. The double-clamped beam prevents stiction-related failure between the channel-beam and drain despite the contact gap being only 370 nm for a <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$&gt; 500~\mu \text{m}$ </tex-math></inline-formula> long beam. The resulting printed relay delivers a turn-ON delay of <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$8~\mu \text{s}$ </tex-math></inline-formula> at a gate voltage of 10 V, a pull-in voltage of only 7.2 V, immeasurable off-leakage, excellent subthreshold swing, and a small hysteresis window of 2 V without any bending or collapsing of the beam. The device also shows reliable operation over <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$10^{5}$ </tex-math></inline-formula> cycles while maintaining a high ON/OFF ratio of <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$10^{8}$ </tex-math></inline-formula> , and extremely low ON-state resistance of 3.7 <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\Omega $ </tex-math></inline-formula> . [2016-0180]