Abstract
Micromechanical silicon resonant accelerometer can easily realize high-accuracy measurement by taking the digital signal as the output. Thus, this accelerometer has become popular in the field of micromechanical accelerometer. One-mass accelerometer with differential structure has blind area in measuring, and to overcome this deficiency, a new structure without mechanical coupling is designed. This new structure can cut off coupling channels by isolating the mass, and vibration decoupling between two resonators can be achieved structurally. Furthermore, the scale factor of the designed accelerometer is as high as 295 Hz/g. This finding indicates that this accelerometer has high mechanical sensitivity, which reduces the difficulty of follow-up testing.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
